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Tergeo-EM
Location: Home / Product / Tergeo-EM
PIE plasma cleaners Tergeo
Product Details
Tergeo-EM is an all-in-one laboratory plasma cleaning, etching and surface treatment system.
Technical specifications
1.Integrated direct/immersion and remote/downstream cleaning modes
2.Plasma sensor for real time plasma intensity measurement
3.Pulsed operation for millisecond short pulse .
4.All-in-one laboratory plasma etching, treatment and cleaning system.
5.Large sample chamber for batch processing. Quartz tube ID:110mm, depth 280mm, with a rectangular quartz sample tray (100mmX250mm) to hold batch of samples.
6.Dual TEM rod adapter, can be configured to support TEM rods from two different vendors.
Product appearance
Application example
